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Fabrication, electrical characterization and sub-ng mass resolution of sub-μm air-gap bulk mode MEMS mass sensors for the detection of airborne particles

Soysal, U., Marty, F.,Gehin, E., Motzkus, Algre, E,  (2020) Fabrication, [...]

By |2023-05-30T09:58:53+00:00May 30th, 2023|Articles dans revues internationales à comité de lecture|Comments Off on Fabrication, electrical characterization and sub-ng mass resolution of sub-μm air-gap bulk mode MEMS mass sensors for the detection of airborne particles

Exploring deposition pattern characteristics of aerosols and bioaerosols by inertial impaction for the development of real-time silicon MEMS mass detection systems

Soysal, U., Gehin, E., Marty, F., Algre, E., Robine, E., [...]

By |2023-05-26T11:03:04+00:00May 26th, 2023|Articles dans revues internationales à comité de lecture|Comments Off on Exploring deposition pattern characteristics of aerosols and bioaerosols by inertial impaction for the development of real-time silicon MEMS mass detection systems
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